The Uppsala group have been also capable to undertake deposition of copper steel by ALD employing copper(I) chloride.23 In such a case, the copper steel was deposited on tantalum metallic foils, working with an evaporation temperature of 350°C plus a deposition temperature range of 360°C– 410°C. The growth for every https://jasperiuhxu.answerblogs.com/20066158/about-thin-film-deposition